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美***SONIX 晶圓檢測設(shè)備 AutoWafe Pro.

SONIX AutoWafer Pro™ 是專為全自動晶圓檢測設(shè)計的機型，主要應(yīng)用在Bond wafer，MEMS 內(nèi)部空洞、離層檢測，TSV量測方面。

● 使用于200和300mm晶圓
● 符合******凈化間標準
● Cassette裝載，全自動檢測，支持FOUP或FOSB機械臂
● 支持200mm & 300mm SECS/GEM協(xié)議
● KLARF輸出文件

AutoWafe Pro, SONIX wafer detection device.

SONIX AutoWafer Pro™ is designed for fully automatic wafer detection, mainly for Bond wafer, MEMS internal cavity detection, separation detection, ａnd TSV measurement.

● for 200 mm ａnd 300mm wafers

● comply with the standard of first class purification room

Cassette loaded, fully automatic detection, support for FOUP or FOSB manipulator

● support 200mm & 300mm SECS/GEM protocol

● KLARF output file